Solar cell and method of manufacturing the same

ABSTRACT

A solar cell and a method of manufacturing the same are disclosed. The solar cell includes a substrate of a first conductive type having at least one via hole; an emitter layer only on at least a portion of the via hole and at least one selected from a group consisting of an incident surface and side surfaces of the substrate, the emitter layer having a second conductive type opposite the first conductive type; at least one first electrode on the incident surface, the first electrode being electrically connected to the emitter layer; a second electrode connected to an opposite surface to the incident surface; and at least one first electrode current collector on the opposite surface, the at least one first electrode current collector being insulated from the second electrode and being electrically connected to the at least one first electrode through the via hole.

This application is a continuation of U.S. application Ser. No.12/559,542, filed on Sep. 15, 2009 now U.S. Pat. No. 8,203,072, whichclaims priority to and the benefit of Korean Patent Application No.10-2009-0055379 filed in the Republic of Korea on Jun. 22, 2009. Theentire contents of all of the above applications are hereby incorporatedby reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Embodiments relate to a solar cell and a method of manufacturing thesame.

2. Description of the Related Art

Recently, as existing energy sources such as petroleum and coal areexpected to be depleted, interests in alternative energy sources forreplacing the existing energy sources are increasing. Among thealternative energy sources, solar cells have been particularlyspotlighted because, as cells for generating electric energy from solarenergy, the solar cells are able to draw energy from an abundant sourceand do not cause environmental pollution.

A general solar cell includes a substrate and an emitter layer, formedof a semiconductor, each having a different conductive type such as ap-type and an n-type, and electrodes respectively formed on thesubstrate and the emitter layer. The general solar cell also includes ap-n junction formed at an interface between the substrate and theemitter layer.

When light is incident on the solar cell, a plurality of electron-holepairs are generated in the semiconductor. Each of the electron-holepairs is separated into electrons and holes by the photovoltaic effect.Thus, the separated electrons move to the n-type semiconductor (e.g.,the emitter layer) and the separated holes move to the p-typesemiconductor (e.g., the substrate), and then the electrons and holesare collected by the electrodes electrically connected to the emitterlayer and the substrate, respectively. The electrodes are connected toeach other using electric wires to thereby obtain an electric power.

At least one current collector like a bus bar is positioned on each ofthe emitter layer and the substrate, and the current collector on theemitter layer and the current collector on the substrate are connectedto the corresponding electrodes, respectively. Hence, charges collectedby the electrode easily move to a load connected to the outside throughthe current collector adjacent to the electrode.

However, in this case, because the current collectors are respectivelyformed on one surface of the substrate on which the light is notincident and the other surface of the substrate on which the light isincident (i.e., the emitter layer on an incident surface of thesubstrate), an incident area of the light is reduced. Hence, theefficiency of the solar cell is reduced.

Accordingly, a metal wrap through (MWT) solar cell was developed so asto prevent a reduction in the efficiency of the solar cell resultingfrom the current collectors. In the MWT solar cell, a current collectorconnected to an emitter layer was positioned on a rear surface of asubstrate opposite an incident surface of the substrate.

SUMMARY OF THE INVENTION

Embodiments provide a solar cell and a method of manufacturing the samecapable of improving an efficiency of the solar cell.

In one aspect there is a solar cell including a substrate of a firstconductive type having at least one via hole; an emitter layer only onat least a portion of the at least one via hole and at least oneselected from a group consisting of an incident surface and sidesurfaces of the substrate, the emitter layer having a second conductivetype opposite the first conductive type; at least one first electrode onthe incident surface of the substrate, the first electrode beingelectrically connected to the emitter layer; a second electrodeconnected to an opposite surface to the incident surface of thesubstrate; and at least one first electrode current collector on theopposite surface, the at least one first electrode current collectorbeing insulated from the second electrode and being electricallyconnected to the at least one first electrode through the at least onevia hole.

In another aspect, there is a method of manufacturing a solar cellincluding forming at least one via hole on a substrate of a firstconductive type; forming an emitter layer of a second conductive typeopposite the first conductive type only on at least a portion of the atleast one via hole and at least one selected from a group consisting ofan incident surface and side surfaces of the substrate; and forming aplurality of first electrodes electrically connected to the emitterlayer, a first electrode current collector electrically connected to thefirst electrodes through the at least one via hole, a second electrodethat is positioned on the substrate, and a second electrode currentcollector that is electrically connected to the second electrode.

Further scope of applicability of the present invention will becomeapparent from the detailed description given hereinafter. However, itshould be understood that the detailed description and specificexamples, while indicating preferred embodiments of the invention, aregiven by illustration only, since various changes and modificationswithin the spirit and scope of the invention will become apparent tothose skilled in the art from this detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention. In the drawings:

FIG. 1 is a partial perspective view of a solar cell according to anexample embodiment;

FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1;

FIGS. 3A to 3M are cross-sectional views sequentially illustrating eachof stages in a method of manufacturing a solar cell according to anexample embodiment;

FIG. 4 is another cross-sectional view of a solar cell taken along theline II-II of FIG. 1; and

FIG. 5 is another cross-sectional view of a solar cell taken along theline II-II of FIG. 1.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The invention will be described more fully hereinafter with reference tothe accompanying drawings, in which example embodiments of theinventions are shown. This invention may, however, be embodied in manydifferent forms and should not be construed as limited to theembodiments set forth herein.

In the drawings, the thickness of layers, films, panels, regions, etc.,are exaggerated for clarity. Like reference numerals designate likeelements throughout the specification. It will be understood that whenan element such as a layer, film, region, or substrate is referred to asbeing “on” another element, it can be directly on the other element orintervening elements may also be present. In contrast, when an elementis referred to as being “directly on” another element, there are nointervening elements present.

FIG. 1 is a partial perspective view of a solar cell according to anexample embodiment. FIG. 2 is a cross-sectional view taken along lineII-II of FIG. 1. As shown in FIG. 1, a solar cell 1 according to anembodiment includes a substrate 110 having a plurality of via holes 181,an emitter layer 120 on the substrate 110, an anti-reflection layer 130,a passivation layer 190, a plurality of front electrodes 141, a rearelectrode conductive layer 155, a plurality of front electrode currentcollectors 161 connected to the front electrodes 141, a plurality ofrear electrode current collectors 162, and a plurality of back surfacefield (BSF) layers 170. The anti-reflection layer 130 is positioned onan incident surface (hereinafter, referred to as “a front surface”) ofthe substrate 110, on which light is incident, and on the emitter layer120 inside the via hole 181. The passivation layer 190 is positioned ona rear surface (also referred to as an opposite surface), opposite thefront surface of the substrate 110, on which the light is not incident,and at a side wall of each of the via holes 181. The front electrodes141 are formed on a portion of the front surface of the substrate 110.The rear electrode conductive layer 155 is positioned on the passivationlayer 190 and includes a plurality of rear electrodes 151 electricallyconnected to the substrate 110. The rear electrode current collectors162 are connected to the rear electrodes 151 through the rear electrodeconductive layer 155. The BSF layers 170 are positioned between thesubstrate 110 and the rear electrodes 151.

In the example embodiment, the substrate 110 may be formed of silicondoped with impurities of a first conductive type, for example, a p-type,though not required. Examples of silicon include single crystal silicon,polycrystalline silicon, and amorphous silicon. When the substrate 110is of a p-type, the substrate 110 contains impurities of a group IIIelement such as boron (B), gallium (Ga), and Indium (In). Alternatively,the substrate 110 may be of an n-type, and/or be made of other materialsthan silicon. When the substrate 110 is of the n-type, the substrate 110may contain impurities of a group V element such as phosphor (P),arsenic (As), and antimony (Sb).

The surface of the substrate 110 is textured to form a textured surfacecorresponding to an uneven surface. The plurality of via holes 181passing through the substrate 110 are formed at each of crossings of thefront electrodes 141 and the front electrode current collectors 161.

The emitter layer 120 is an impurity portion having a second conductivetype (for example, an n-type) opposite the first conductive type of thesubstrate 110. The emitter layer 120 and the substrate 110 form a p-njunction.

A plurality of electron-hole pairs produced by light incident on thesubstrate 110 are separated into electrons and holes by a built-inpotential difference resulting from the p-n junction. Then, theseparated electrons move toward the n-type semiconductor, and theseparated holes move toward the p-type semiconductor. Thus, when thesubstrate 110 is of the p-type and the emitter layer 120 is of then-type, the separated holes and the separated electrons move toward thesubstrate 110 and the emitter layer 120, respectively. Accordingly, theholes in the substrate 110 and the electrons in the emitter layer 120become major carriers.

Because the substrate 110 and the emitter layer 120 form the p-njunction, the emitter layer 120 may be of the p-type when the substrate110 is of the n-type unlike the embodiment described above. In thiscase, the separated electrons and the separated holes move toward thesubstrate 110 and the emitter layer 120, respectively.

Returning to the embodiment when the emitter layer 120 is of the n-type,the emitter layer 120 may be formed by doping the substrate 110 withimpurities of a group V element such as P, As, and Sb. On the contrary,when the emitter layer 120 is of the p-type, the emitter layer 120 maybe formed by doping the substrate 110 with impurities of a group IIIelement such as B, Ga, and In.

The anti-reflection layer 130 formed of silicon nitride (SiNx) and/orsilicon oxide (SiO_(x)) is positioned on the emitter layer 120positioned on the front surface of the substrate 110 and at the sidewall of the via hole 181. The anti-reflection layer 130 reduces areflectance of light incident on the substrate 110 and increases aselectivity of a predetermined wavelength band, thereby increasing theefficiency of the solar cell 1. The anti-reflection layer 130 may have athickness of about 80 nm to 100 nm. Alternatively, the anti-reflectionlayer 130 may be positioned at only the side wall of each of the viaholes 181. The anti-reflection layer 304 may be omitted, if desired.

Although it is not shown in FIGS. 1 and 2, the anti-reflection layer 130and the emitter layer 120 each have an exposing portion (not shown)exposing a portion of an edge of the front surface of the substrate 110,so as to implement an edge isolation of the substrate 110.

The passivation layer 190 is positioned on the rear surface of thesubstrate 110 and on the anti-reflection layer 130 positioned at theside wall of each of the via holes 181. The passivation layer 190reduces a recombination of charges around the surface of the substrate110 and increases an inner reflectance of light passing through thesubstrate 110 to thereby increase a re-incidence of the light passingthrough the substrate 110.

The passivation layer 190 has a three-layered structure including afirst passivation layer 191 formed of silicon oxide (SiO_(X)), a secondpassivation layer 192 formed of silicon nitride (SiNx) on the firstpassivation layer 191, an a third passivation layer 193 formed ofsilicon oxynitrides (SiOxNy) on the second passivation layer 192. Othermaterials may be used for each of the first to third passivation layers191 to 193.

The first and second passivation layers 191 and 192 change an unstablebond, like a dangling bond, existing around the surface of the substrate110 into a stable bond to reduce a recombination and/or a disappearancebetween charges (for example, holes) moving to the substrate 110 and anunstable bond. The third passivation layer 193 protects the first andsecond passivation layers 191 and 192 from the rear electrode conductivelayer 155. The first to third passivation layers 191 to 193 reflectincident light passing through the substrate 110 back to the substrate110 to increase an inner reflectance of the solar cell 1.

A thickness and a refractive index of each of the first to thirdpassivation layers 191 to 193 may be properly adjusted, so that thefirst to third passivation layers 191 to 193 perform the above-describedoperations. For example, the first and third passivation layers 191 and193 may have the substantially same thickness, such as, a thickness ofabout 200 nm, and a thickness of the second passivation layer 192 mayhave a thickness of about 20 nm less than the thickness of the first andthird passivation layers 191 and 193, for example. Further, refractiveindexes of the second and third passivation layers 192 and 193 may begreater than a refractive index of the first passivation layer 191. Inthe embodiment, the second passivation layer 192 have a maximumrefractive index, and the first passivation layer 191 has a minimumrefractive index. However, the thickness and the refractive index ofeach of the first to third passivation layers 191 to 193 may varydepending on a material, a function, a formation method, etc., of thefirst to third passivation layers 191 to 193.

In the embodiment, the passivation layer 190 has the three-layeredstructure including the first to third passivation layers 191 to 193,but is not limited thereto. The number of layers constituting thepassivation layer 190 may vary.

In the embodiment, the first passivation layer 191, the secondpassivation layer 192, and the passivation layer 193 are sequentiallyformed on the substrate 110 in the order named, but is not limitedthereto. A stacking order of the first to third passivation layers 191to 193 on the substrate 110 may vary. At least one of the first to thirdpassivation layers 191 to 193 may be formed of amorphous silicon. Forexample, if the first passivation layer 191 is formed of amorphoussilicon, the first passivation layer 191 efficiently inactivates anunstable bond to greatly reduce a recombination of charges on thesurface of the substrate 110.

In the embodiment, because the anti-reflection layer 130 and thepassivation layer 190 are positioned at the side wall of the via hole181, the total number of layers formed at the side wall of the via hole181 may be 2 to 4.

The front electrodes 141 are positioned on the emitter layer 120 formedon the front surface of the substrate 110. In addition, the frontelectrodes 141 are electrically connected to the emitter layer 120 andextend in a fixed direction to be spaced apart from one another. Thefront electrodes 141 collect charges (for example, electrons) moving tothe emitter layer 120 and transfer the collected charges to the frontelectrode current collectors 161 through the via holes 181. The frontelectrodes 141 are formed of at least one conductive metal material.More specifically, the front electrodes 141 may be formed of at leastone selected from a group consisting of nickel (Ni), copper (Cu), silver(Ag), aluminum (Al), tin (Sn), zinc (Zn), indium (In), titanium (Ti),gold (Au), and a combination thereof Other conductive metal materialsmay be used.

The rear electrode conductive layer 155 is formed of a conductive metalmaterial and is positioned on the passivation layer 190. A plurality ofexposing portions 182 exposing a portion of the substrate 110 around thefront electrode current collectors 161 are formed in the rear electrodeconductive layer 155, the front electrode current collectors 161, and/orthe passivation layer 190.

The rear electrodes 151 are formed by the rear electrode conductivelayer 155 contacting a portion of the rear surface of the substrate 110passing through the passivation layer 190. An electrical connectionbetween the rear electrodes 151 and the front electrode currentcollectors 161 is cut off due to the exposing portions 182.

The rear electrodes 151 are spaced apart from one another at a constantdistance and are electrically connected to the substrate 110. The rearelectrodes 151 may have various shapes such as a circle, an oval, and/ora polygon. In addition, the rear electrodes 151 may have the same stripeshape as the front electrode 141, and thus the rear electrodes 151 areelectrically connected to the substrate 110 and extend in one direction.The number of rear electrodes 151 having the stripe shape is much lessthan the number of rear electrodes 151 having the circle, oval, orpolygon shape.

As above, in the embodiment, because the passivation layer 190 ispositioned between the substrate 110 and the rear electrode conductivelayer 155 and only a portion of the substrate 110 contacts the rearelectrodes 151, a bowing phenomenon of the substrate 110 in the solarcell according to the embodiment is greatly reduced as compared with asolar cell including rear electrodes contacting an entire surface of asubstrate. Hence, a damage of the substrate 110 resulting from thebowing phenomenon is greatly reduced. The rear electrodes 151 collectcharges (for example, holes) moving to the substrate 110.

The rear electrodes 151 are formed of at least one conductive metalmaterial. More specifically, the rear electrodes 151 may be formed of atleast one selected from the group consisting of Ni, Cu, Ag, Al, Sn, Zn,In, Ti, Au, and a combination thereof. Other conductive metal materialsmay be used.

The plurality of front electrode current collectors 161 are positionedin each of the via holes 181 and on the passivation layer 190 positionedaround the via holes 181. The front electrode current collectors 161extend in a cross direction with respect to the front electrode 141.

The front electrode current collectors 161 are formed of at least oneconductive metal material and are electrically connected to the frontelectrodes 141 crossing the front electrode current collectors 161through the via holes 181. Accordingly, the front electrode currentcollectors 161 output charges transferred from the front electrodes 141to an external device. The front electrode current collectors 161 may beformed of at least one selected from the group consisting of Ni, Cu, Ag,Al, Sn, Zn, In, Ti, Au, and a combination thereof. Other conductivemetal materials may be used.

The rear electrode current collectors 162 are positioned on thepassivation layer 190 and extend parallel to the front electrode currentcollectors 161. The rear electrode current collectors 162 collectcharges (for example, holes) transferred from the rear electrode 151through the rear electrode conductive layer 155 to output the collectedcharges to an external device.

In the embodiment, the rear electrode current collectors 162 have ashape of extending in a fixed direction, similar to the front electrodecurrent collectors 161. However, the rear electrode current collectors162 may include a plurality of circle or polygon-shaped conductors thatare spaced apart from one another at a constant distance or interval,though not required. The rear electrode current collectors 162 areformed of the same material as the front electrode current collectors161 and are positioned on the same level layer as the front electrodecurrent collectors 161.

The plurality of BSF layers 170 are positioned between the rearelectrode 151 and the substrate 110. The BSF layers 170 are areas (forexample, a p+-type area) that are more heavily doped with impurities ofthe same conductive type as the substrate 110 than the substrate 110.The smooth movement of electrons to the rear surface of the substrate110 is disturbed by a potential barrier resulting from a differencebetween impurity doping concentrations of the substrate 110 and the BSFlayers 170. Accordingly, the BSF layers 170 prevent or reduce arecombination and/or a disappearance of the electrons and holes in aninterface of the substrate 110 and the rear electrodes 151.

In the solar cell 1 according to the embodiment having theabove-described structure, the front electrode current collectors 161are positioned on the rear surface of the substrate 110 on which lightis not incident, the front electrodes 141 on the front surface of thesubstrate 110 are electrically connected to the front electrode currentcollectors 161 using the plurality of via holes 181, and the passivationlayer 190 is formed on the rear surface of the substrate 110 to reduce acontact area between the substrate 110 and the rear electrodes 151. Anoperation of the solar cell 1 will be below described in detail.

When light irradiated to the solar cell 1 is incident on the substrate110 through the anti-reflection layer 130 and the emitter layer 120, aplurality of electron-hole pairs are generated in the substrate 110 bylight energy based on the incident light. Because the surface of thesubstrate 110 is a textured surface, a light reflectance in the frontsurface of the substrate 110 is reduced. Further, because both a lightincident operation and a light reflection operation are performed on thetextured surface, the light is confined in the solar cell 1. Hence, alight absorptance increases, and the efficiency of the solar cell 1 isimproved. In addition, because a reflection loss of light incident onthe substrate 110 is reduced by the anti-reflection layer 130, an amountof light incident on the substrate 110 further increases.

The electron-hole pairs are separated by the p-n junction of thesubstrate 110 and the emitter layer 120, and the separated electronsmove to the n-type emitter layer 120 and the separated holes move to thep-type substrate 110. The electrons moving to the n-type emitter layer120 are collected by the front electrodes 141 and then are transferredto the front electrode current collectors 161. The holes moving to thep-type substrate 110 are collected by the rear electrode 151 and thenare transferred to the rear electrode current collectors 162. When thefront electrode current collectors 161 are connected to the rearelectrode current collectors 162 using electric wires (not shown),current flows therein to thereby enable use of the current for electricpower.

In the embodiment, because the front electrode current collectors 161are positioned on the rear surface of the substrate 110 on which lightis not incident, an incident area of light increases and the efficiencyof the solar cell 1 is improved.

In the embodiment, the passivation layer 190 having a multi-layeredstructure is positioned between the substrate 110 and the rear electrodeconductive layer 155, and the rear electrodes 151 are formed by bringinga portion of the rear electrode conductive layer 155 into contact withthe substrate 110, instead of having the rear electrodes formed on theentire rear surface of the substrate 110. Hence, in the solar cell 1according to the embodiment, a contact area between the rear electrodes151 and the substrate 110 is greatly reduced as compared with a solarcell including a plurality of rear electrodes on an entire rear surfaceof a substrate. Nevertheless, because the unstable bond on the surfaceof the substrate 110 changes into an inactive state (or passivated) bythe passivation layer 190, a recombination of charges resulting from theunstable bond on the surface of the substrate 110 is greatly reduced.Accordingly, a use efficiency of light having a long wavelength isimproved, and the efficiency of the solar cell 1 is improved.

FIGS. 3A to 3M are cross-sectional views sequentially illustrating eachof stages in a method of manufacturing a solar cell according to anexample embodiment. As shown in FIG. 3A, a plurality of via holes 181are formed on a substrate 110 formed of p-type single crystal silicon orp-type polycrystalline silicon. The via holes 181 are formed through alaser drilling method using a laser beam. Other methods may be used forforming the via holes 181.

As shown in FIG. 3B, a texturing process is performed on the entiresurface of the substrate 110 to form a textured surface of the substrate110. However, a side wall of each of the via holes 181 need not have thetextured surface, though such may be optional. When the substrate 110 isformed of p-type single crystal silicon, the texturing process isperformed using a basic solution such as KOH, NaOH, andtetramethylammonium hydroxide (TMAH). When the substrate 110 is formedof p-type polycrystalline silicon, the texturing process is performedusing an acid solution such as HF and HNO₃.

As shown in FIG. 3C, a high temperature thermal process of a material(for example, POCl₃ or H₃PO₄) containing impurities of a group V elementsuch as P, As, and Sb is performed on the substrate 110 to distributethe group V element impurities on the substrate 110. Hence, an emitterlayer 120 is formed on the entire surface of the substrate 110 includinga front surface, a rear surface, and an inner surface of the substrate110 and/or a side surface (or side walls) of each of the via holes 181.Unlike the embodiment, when the substrate 110 is of an n-type, a hightemperature thermal process of a material (for example, B₂H₆) containinggroup III element impurities is performed on the substrate 110 or thematerial containing the group III element impurities is stacked on thesubstrate 110 to form the p-type emitter layer 120 on the entire surfaceof the substrate 110. Then, phosphorous silicate glass (PSG) containingphosphor (P) or boron silicate glass (BSG) containing boron (B) producedwhen p-type impurities or n-type impurities are distributed inside thesubstrate 110 are removed through an etching process.

As shown in FIG. 3D, an anti-reflection layer 130 is formed on the frontsurface of the substrate 110 and at the side wall of each of the viaholes 181 using a chemical vapor deposition (CVD) method such as aplasma enhanced chemical vapor deposition (PECVD) method. In addition,the anti-reflection layer 130 may be formed inside the via holes 181.

As shown in FIG. 3E, a portion of the rear surface of the substrate 110is removed using a wet or dry etching method, and thus a portion of theemitter layer 120 on the rear surface of the substrate 110 is removed.In this case, the emitter layer 120 and/or anti-reflection layer 130formed at the side wall of the via holes 181 may be partially removed.

Alternatively, a removing operation for the portion of the rear surfaceof the substrate 110 may be avoided or omitted if the emitter layer isnot formed on the rear surface of the substrate 110. That is, instead offorming the emitter layer 120 over the entire surface of the substrate110, including the rear surface of the substrate 110, as shown in FIG.3C, forming of the emitter layer 120 on the rear surface of thesubstrate 110 may be avoided or omitted by using a mask or a barrierlayer on the rear surface of the substrate 110. The mask or the barrierlayer then may be removed, for example, by a separate etching operation.

As shown in FIGS. 3F to 3H, a first passivation layer 191 formed ofsilicon oxide (SiO_(X)), a second passivation layer 192 formed ofsilicon nitride (SiNx), and a third passivation layer 193 formed ofsilicon oxynitride (SiOxNy) are sequentially formed on the rear surfaceof the substrate 110 in the order named using the CVD method such as thePECVD method to complete a passivation layer 190. The first and thirdpassivation layers 191 and 193 each have a thickness of about 200 nm,and the second passivation layer 192 has a thickness of about 20 nm. Informing the passivation layer 190, such as the first through thirdpassivation layers 191-193, on the rear surface of the substrate 110,the passivation layer 190, such as the first through third passivationlayers 191-193, may also be deposited in the via hole 181 on the sidewall thereof, in the same order as on the rear surface, though such isnot required. In embodiments, not all of the first through thirdpassivation layers 191-193 may need to be used or required. That is,components of the passivation layer 190 within the via hole 181 or onthe side wall of the via hole 181 may be different from components ofthe passivation layer 190 on the rear surface of the substrate 110.Accordingly, the passivation layer 190 or components thereof for the viahole 181 and the passivation layer 190 or components thereof for therear surface of the substrate 110 may be formed together or separately.

As shown in FIG. 3I, a paste containing Ag is coated on a correspondingportion of the substrate 110 using a screen printing method and then isdried at about 120° C. to 200° C. to form a front electrode currentcollector pattern 165 and a rear electrode current collector pattern166.

As shown in FIG. 3J, a paste containing Ag is coated on a correspondingportion using the screen printing method and then is dried to form afront electrode pattern 140. The Ag-containing paste forming the frontelectrode current collector pattern 165, the rear electrode currentcollector pattern 166, and the front electrode pattern 140 may includeat least one selected from the group consisting of Ni, Cu, Al, Sn, Zn,In, Ti, Au, and a combination thereof, instead of Ag. Other conductivemetal materials may be used.

As shown in FIG. 3K, a paste containing Al is coated on a correspondingportion of the substrate 110 using the screen printing method and thenis dried to form a rear electrode conductive layer pattern 150. In thiscase, the rear electrode conductive layer pattern 150 is formed in aremaining portion excluding a formation portion of the front electrodecurrent collector pattern 165 and the rear electrode current collectorpattern 166 from the rear surface of the substrate 110. In theembodiment, a formation order of the front electrode pattern 140, thefront electrode current collector pattern 165, the rear electrodecurrent collector pattern 166, and the rear electrode conductive layerpattern 150 may vary.

As shown in FIG. 3L, a laser beam is irradiated onto a fixed portion ofthe rear electrode conductive layer pattern 150 to form rear electrodepatterns 153 formed of a molten mixture of components of the rearelectrode conductive layer pattern 150, the passivation layer 190, andthe substrate 110.

A wavelength of the laser beam used may be approximately 355 nm or 532nm. When the wavelength of the laser beam is approximately 355 nm, anintensity of the laser beam is approximately 1 W. When the wavelength ofthe laser beam is approximately 532 nm, an intensity of the laser beamis approximately 10 W. The wavelength and the intensity of the laserbeam used may vary depending on a thickness and a material of the rearelectrode conductive layer pattern 150, a material and the number oflayers of the passivation layer 190, etc. Further, the number ofirradiation operations of the laser beam onto the same portion may varydepending on the thickness and the material of the rear electrodeconductive layer pattern 150, the material and the number of layers ofthe passivation layer 190, etc.

As shown in FIG. 3M, the substrate 110 including the front electrodepattern 140, the front electrode current collector pattern 165, the rearelectrode current collector pattern 166, and the rear electrodeconductive layer pattern 150 is fired at a temperature of about 750° C.to 800° C. to form a plurality of front electrodes 141, a plurality offront electrode current collectors 161 electrically connected to thefront electrodes 141, a rear electrode conductive layer 155 including aplurality of rear electrodes 151, and a plurality of BSF layers 171.

More specifically, when a thermal process is performed, the plurality offront electrodes 141, that pass through contact portions with theanti-reflection layer 130 and the front electrode pattern 140 andcontact the emitter layer 120, are formed due to elements such as Pbcontained in the front electrode pattern 140. In addition, the rearelectrode patterns 153 contact the substrate 110 to form the pluralityof rear electrodes 151. In this case, metal components contained in eachof the patterns 140, 165, 166, and 150 chemically couples with thelayers 120 and 110, and thus a contact resistance is reduced. Hence, acurrent flow is improved.

Further, when the thermal process is performed, Al contained in the rearelectrodes 151 is distributed to the substrate 110 contacting the rearelectrodes 151 to form the plurality of BSF layers 171 between the rearelectrodes 151 and the substrate 110. In this case, the BSF layers 171are an area doped with impurities of the same conductive type as thesubstrate 110, for example, p-type impurities. An impurity dopingconcentration of the BSF layers 171 is greater than an impurity dopingconcentration of the substrate 110, and thus the BSF layers 171 are ap+-type area.

In the embodiment, because the anti-reflection layer 130 and thepassivation layer 190 are formed at the side wall of each of the viaholes 181, a damage of the emitter layer 120 generated when the hightemperature thermal process including the drying and firing operationsis performed can be reduced or prevented, and a generation of a leakagecurrent can be reduced or prevented. Further, because the passivationlayer 190 has the multi-layered structure, the damage of the emitterlayer 120 is further reduced or prevented.

Next, a plurality of exposing portions 182 exposing a portion of thesubstrate 110 are formed around the front electrode current collectors161 using a laser beam to electrically separate the rear electrodes 151electrically connected to the substrate 110 from the front electrodecurrent collectors 161. The solar cell 1 shown in FIGS. 1 and 2 iscompleted thereby. Further, before and after the plurality of exposingportions 182 are formed, a portion of the anti-reflection layer 130formed at an edge of the front surface of the substrate 110 and aportion of the emitter layer 120 underlying the anti-reflection layer130 are removed to form an exposing portion (not shown) exposing aportion of the front surface of the substrate 110. Hence, an edgeisolation of the substrate 110 is implemented through the exposingportion. In addition, the exposing portions 182 and the exposing portionused in the edge isolation may be formed using a PECVD method instead ofthe laser beam.

In the solar cell 1 manufactured through the above-described processes,the anti-reflection layer 130 and the passivation layer 190 may benon-uniformly formed at the side wall of the via hole 181 depending on adiameter of the via hole 181, a diffusion speed, a diffusion distance, adiffusion state, etc. when the anti-reflection layer 130 and thepassivation layer 190 are formed. Accordingly, as shown in FIG. 4, thenumber of layers formed at the side wall of the via hole 181 may varydepending on a location of the side wall of the via hole 181. Forexample, the number of layers formed at the side wall of the via hole181 increases in a portion adjacent to an injection location of aprocess gas in a vapor state used to form each of layers constitutingthe passivation layer 190. Namely, the number of layers formed at theside wall of the via hole 181 increases as the side wall of the via hole181 approaches the rear surface of the substrate 110.

Further, as shown in FIG. 4, even if the number of layers formed at theside wall of the via hole 181 is constant, a total thickness of layersformed at the side wall of the via hole 181 may vary depending on a theinjection location of the process gas, i.e., depending on a distance(i.e., an injection distance) between the injection location of theprocess gas and the side wall of the via hole 181. Accordingly, thetotal thickness of layers formed at the side wall of the via hole 181increases as the side wall of the via hole 181 approaches the rearsurface of the substrate 110 (i.e., as the injection distance becomesshorter). However, in this case, because the side wall of the via hole181 is protected by the anti-reflection layer 130 and the passivationlayer 190 including at least one layer, a generation of a leakagecurrent resulting from the damage of the emitter layer 120 after thethermal process is reduced or prevented. During a fabrication of thesolar cell 1 through the processes illustrated in FIGS. 3A to 3M, aportion of the substrate 110 may be exposed through the side wall of thevia hole 181.

As shown in FIG. 3E, when the emitter layer 120 on the rear surface ofthe substrate 110 is removed, a portion of the anti-reflection layer 130inside the via hole 181 and a portion of the emitter layer 120underlying the anti-reflection layer 130 may be removed. Hence, after aremoving process of the emitter layer 120 on the rear surface of thesubstrate 110, a portion of the substrate 110 may be exposed through theside wall of the via hole 181. In this case, as the emitter layer 120and the anti-reflection layer 130 approach the rear surface of thesubstrate 110, a probability to remove the emitter layer 120 and theanti-reflection layer 130 inside the via hole 181 together with theemitter layer 120 on the rear surface of the substrate 110 increases.However, in the embodiment, because the passivation layer 190 having themulti-layered structure is positioned at the side wall of the via hole181, as shown in FIG. 5, the portion of the substrate 110 exposed at theside wall of the via hole 181 is covered by the anti-reflection layer130 in a subsequent process.

As shown in FIG. 4, because a formation of the passivation layer 190 iseasily performed at the rear surface of the substrate 110 having a highremoving probability of the emitter layer 120, the exposed portion ofthe substrate 110 through at the side wall of the via hole 181 is easilycovered by the passivation layer 190. Accordingly, even if the portionof the emitter layer 120 and the portion of the anti-reflection layer130 are damaged and the portion of the substrate 110 is exposed at theside wall of the via hole 181, the exposed portion of the substrate 110is protected by the passivation layer 190. Hence, a leakage phenomenonof a current flowing from the front electrode 141 to the front electrodecurrent collector 161 is reduced.

In embodiments of the invention, reference to front or back, withrespect to electrode, a surface of the substrate, or others is notlimiting. For example, such a reference is for convenience ofdescription since front or back is easily understood as examples offirst or second of the electrode, the surface of the substrate orothers.

While this invention has been described in connection with what ispresently considered to be practical example embodiments, it is to beunderstood that the invention is not limited to the disclosedembodiments, but, on the contrary, is intended to cover variousmodifications and equivalent arrangements included within the spirit andscope of the appended claims.

What is claimed is:
 1. A solar cell, comprising: a substrate doped with impurities of a first conductive type and having at least one via hole penetrating the substrate; an emitter layer positioned on a first surface of the substrate, the emitter layer being doped with impurities of a second conductive type opposite the first conductive type; an anti-reflection layer positioned on the emitter layer on the first surface of the substrate; at least one first electrode positioned on the emitter layer, the at least one first electrode being directly contacted with the emitter layer; a passivation layer positioned on a second surface of the substrate opposite the first surface of the substrate, the passivation layer being directly contacted with the second surface of the substrate; a conductive layer locally positioned on the passivation layer positioned on the second surface of the substrate, the conductive layer having at least one second electrode electrically passing through the passivation layer and locally contacted with the second surface of the substrate; and at least one first electrode current collector locally positioned on the passivation layer positioned on the second surface of the substrate, the at least one first electrode current collector being separated from the conductive layer and connected to the at least one first electrode through the at least one via hole, wherein the passivation layer is further positioned on a side wall formed by the substrate in the at least one via hole, the passivation layer is positioned between the at least one first electrode current collector and the side wall formed by the substrate in the at least one via hole, the passivation layer is extended from the side wall formed by the substrate in the at least one via hole to the second surface of the substrate, wherein the emitter layer is further positioned on the side wall formed by the substrate in the at least one via hole, and wherein the anti-reflection layer is further positioned on the side wall formed by the substrate in the at least one via hole.
 2. The solar cell of claim 1, further comprising a back surface field layer positioned on an area in which the at least one second electrode is contacted with the second surface of the substrate, the back surface field layer being doped with impurities of the first conductive type at a greater amount than that of the substrate.
 3. The solar cell of claim 1, wherein the passivation layer is directly contacted with the second surface of the substrate and with the emitter layer passing through the at least one via hole.
 4. The solar cell of claim 1, wherein the conductive layer and the at least one first electrode current collector is spaced apart from each other on the second surface of the substrate.
 5. The solar cell of claim 4, wherein a portion of the passivation layer disposed between the conductive layer and the second surface of the substrate is spaced apart from a portion of the passivation layer disposed between the at least one first electrode current collector and the second surface of the substrate.
 6. The solar cell of claim 1, wherein the passivation layer is further positioned on the anti-reflection layer in the at least one via hole.
 7. The solar cell of claim 1, wherein each of the anti-reflection layer and the passivation layer includes a different material.
 8. The solar cell of claim 1, wherein the passivation layer includes at least one layer containing silicon.
 9. The solar cell of claim 1, wherein the passivation layer includes a first passivation layer positioned on the second surface of the substrate and a second passivation layer positioned on the first passivation layer, and each of the first and second passivation layers is formed of one of silicon oxide, silicon nitride, silicon oxynitride, and amorphous silicon.
 10. The solar cell of claim 9, wherein a length of the first passivation layer in the at least one via hole is different from a length of the second passivation layer in the at least one via hole.
 11. The solar cell of claim 9, wherein each of the first passivation layer and the second passivation layer includes a different material.
 12. The solar cell of claim 9, wherein each of the first and second passivation layers has a different refractive index.
 13. The solar cell of claim 12, wherein a refractive index of the second passivation layer is greater than a refractive index of the first passivation layer.
 14. The solar cell of claim 9, wherein the passivation layer further includes a third passivation layer positioned on the second passivation layer, and the third passivation layer is formed of one of silicon oxide, silicon nitride, silicon oxynitride, and amorphous silicon.
 15. The solar cell of claim 1, wherein a thickness of the passivation layer formed on the side wall of the at least one via hole is changed depending on a formation location of the passivation layer.
 16. The solar cell of claim 1, further comprising at least one second electrode current collector electrically connected to the second electrode.
 17. The solar cell of claim 16, wherein the at least one first electrode current collector and the at least one second electrode current collector are coplanar on the second surface of the substrate. 